Integrated ferroelectric polymer pyroelectric sensors: A comparative studyof PVDF and its copolymer VDF/TrFE film

This paper presents a comparative study of integrated pyroelectric sensors based on ferroelectric polymers using different deposition techniques. A 9 mu m PVDF film is bonded on a silicon substrate using a capacitive (UV curi ng acrylic) thin film and a 1 mu m VDF/TrFE copolymer is coated directly us ing a spin-coating technique. The theoretical response of both PVDF and VDF /TrFE pyroelectric sensors are calculated and related to the measured value s. Responsivities of 4.3 V/W and 1.2 V/W, at 400 Hz, have been achieved for the pyroelectric sensor based on PVDF and VDF/TrFE copolymer respectively. 1/f noise of the MOSFET is the dominant noise source for both sensors, res ulting in an input referred noise voltage of 70 nV/root Hz at 400 Hz.