Report on Brite-EuRam project sensors and mechatronic devices using ferroelectric thin films SEMDEFT

This report describes work carried out over 42 months under a Brite-EuRam p roject concerned with developing technologies to make use of the piezoelect ric and pyroelectric properties of ferroelectric thin films on silicon micr ostructures, with the aim of addressing the burgeoning need for miniature s ensors. To achieve this advances were made in ferroelectric thin film depos ition technologies, ferroelectric materials characterisation, silicon micro machining technologies, ferroelectric processing techniques, modelling of f erroelectric devices and fabrication methods for piezoelectric and pyroelec tric devices. The outcome of fabricating both piezoelectric and pyroelectri c ferroelectric microstructures will be described.