Electromechanical characterization and modelling of piezoelectric thick films

Polycrystalline Pb(ZrxTi1-x)O-3 thick films have been prepared by spin-on a nd rapid sintering in a conventional oven. The remanent polarization and co ercive field of a 80 mu m thick film are studied versus the applied field. Modellings from the admittance curves and from a modified Mason circuit can explain that the weaker electromechanical characteristics of the PZT layer against the bulk material are due both to the porosity and to the existenc e of an inactive layer. A characterization by the beam method shows a good correlation between the theoretical and experimental resonance frequencies.