Microstructure of BaTiO3 and SrTiO3 layers obtained by injection MOCVD

Authors
Lindner, J Weiss, F Senateur, JP Ploss, B Hubert-Pfalzgraf, L Daniele, S
Citation
J. Lindner et al., Microstructure of BaTiO3 and SrTiO3 layers obtained by injection MOCVD, J PHYS IV, 8(P9), 1998, pp. 247-250
Citations number
10
Categorie Soggetti
Physics
Journal title
JOURNAL DE PHYSIQUE IV
ISSN journal
11554339 → ACNP
Volume
8
Issue
P9
Year of publication
1998
Pages
247 - 250
Database
ISI
SICI code
1155-4339(199812)8:P9<247:MOBASL>2.0.ZU;2-R
Abstract
BaTiO3 (BTO) and SrTiO3 (STO) layers were deposited by injection MOCVD usin g both a mixed Ba2Ti2 precursor (dissolved in hexane) and a Sr(thd)(2), Ba( thd)(2) and Ti(OPri)(2)(thd)(2) precursor system (dissolved in monoglyme). Films have been deposited at different temperatures between 600 degrees C a nd 850 degrees C. The microstructural properties of the films obtained on d ifferent kinds of substrates MgO (100), LaAlO3 (012), sapphire (1 - 102), S i (100), Pt on Si and YBa2Cu3O7 (YBCO) on LaAlO3 are compared.