A method of surface passivation of Cd1-xZnxTe (CZT) x-ray and gamma ray det
ectors has been established by using microwave-assisted atomic oxygen bomba
rdment. Detector performance is significantly enhanced due to the reduction
of surface leakage current. CZT samples were exposed to an atomic oxygen e
nvironment at the University of Alabama in Huntsville's Thermal Atomic Oxyg
en Facility. This system generates neutral atomic oxygen species with kinet
ic energies of 0.1-0.2 eV. The surface chemical composition and its morphol
ogy modification due to atomic oxygen exposure were studied by x-ray photoe
lectron spectroscopy and atomic force microscopy and the results were corre
lated with current-voltage measurements and with room temperature spectral
responses to Ba-133 and Am-241 radiation. A reduction of leakage current by
about a factor of 2 is reported, together with significant improvement in
the gamma-ray line resolution. (C) 1999 American Vacuum Society. [S0734-210
1(99)00201-8].