A new and simple variable-angle accessory for infrared specular reflectance

A simple, low-cost accessory (patent pending) with only two flat mirrors an d a new variable-angle mechanism has been developed for infrared specular r eflectance measurements. The system allows the angles of incidence to be va ried continuously from 15 degrees (near normal incidence) to 85 degrees (ne ar grazing angle) without losing the alignment of the accessory. The reflec tivity of boron nitride thin films deposited on metallic substrates has bee n measured at different angles of incidence to demonstrate the utility of t his accessory. (C) 1999 American Vacuum Society. [S0734-2101(99)02001-1].