Preparation of ceramic coatings by CVD techniques

Authors
Ojeda, F Marti, FJ Albella, JM
Citation
F. Ojeda et al., Preparation of ceramic coatings by CVD techniques, B S ESP CER, 37(6), 1998, pp. 447-453
Citations number
26
Categorie Soggetti
Material Science & Engineering
Journal title
BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO
ISSN journal
03663175 → ACNP
Volume
37
Issue
6
Year of publication
1998
Pages
447 - 453
Database
ISI
SICI code
0366-3175(199811/12)37:6<447:POCCBC>2.0.ZU;2-E
Abstract
The fundamentals of the Chemical Vapour Deposition (CVD) techniques and the key parameters determining the characteristics of the deposited layers are described. In addition, we discuss the different activation methods of the precursor gases which are necessary to achieve high reaction rates, and gi ve some practical examples of CVD techniques applied to the preparation of ceramic coatings.