Combined 3D FE and circuit modeling of radio frequency heating systems

This paper presents a completely new approach for the modeling of radio fre quency (rf) heating systems, which is based on a combined finite element an d circuit model. The finite element method is used to obtain the 3D electro magnetic fields inside various applicator configurations. An investigation on the validity of electrostatic conditions inside if applicators has shown that it is only valid for a limited number of cases, and hence the wave eq uation is used. The finite element model is validated using experimental me asurements of the impedance of a prototype applicator. Circuit simulation t echniques are used to model the combined tank-applicator system.