Microstructure and magnetic properties of Fe-Ta-N alloy films near the euta
tic composition were studied. The four systematic alloy films with differen
t Ta content were prepared by reactive sputtering. The dependence of struct
ures and magnetic properties on Ta and annealing were investigated by VSM a
nd X-ray diffraction. It is found that Ta atoms replace Fe in alpha-Fe latt
ice and have strong affinity for nitrogen, which inhibits the formation of
gamma-Fe4N phase in Fe-Ta-N films. The TaN phase precipitates in grain boun
daries and suppresses the growth of alpha-Fe(N) crystalline during annealin
g. Coercivity varies with the change of microstructure. (C) 1999 Elsevier S
cience S.A. All rights reserved.