We present a detailed view of the diffusion of silicon dimers on the silico
n (001) surface. Through a combination of atom tracking and ab initio model
ing, the dimer is shown to move one atom at a time rather than as a two-ato
m unit. The details of the pathway depend on the diffusion channel: On top
of dimer rows, the two atoms of a dimer separate but remain bound during di
ffusion. In the troughs between dimer rows, the two atoms separate complete
ly and move independently before rejoining in a new location. [S0163-1829(9
9)02104-9].