The interaction of deuterium atoms with beryllium TIP-30 at 740 K was studi
ed. A plasma source with heated cathode was used to produce deuterium atoms
. A positive potentials was applied to the beryllium sample during D atoms
exposure to screen in from positive D ions. After D atom exposure for 1 and
4 hours the depth distributions of deuterium atoms and molecules in Be wer
e measured using combined SIMS and RGA methods. It has been shown that deut
erium is retained in Be both in atomic and in molecular forms. Oxide film g
rows on the beryllium surface during the D atom exposure and BeO thickness
correlates with deuterium distribution. The retained deuterium is mainly lo
cated in the oxide layer. It is suggested that the gas filled bubbles and c
avities which are formed in grown oxide layer are the traps for molecular d
euterium. A high concentration of D atoms in the near-surface layers is att
ributed to the chemical bonding of D atoms to BeO oxide with beryllium hydr
oxide formation.