An analytical study of the on-axis aperture defect (spherical aberration) c
onvolved with diffraction, for a simple spheric-based Kirkpatrick-Baez (KB)
grazing incidence x-ray microscope, indicates the optimum performance is a
chieved by using a short object plane to mirror distances, steep grazing an
gles, and high x-ray energies. Other aberrations occur for off-axis field p
oints, but if the spherical aberration can be reduced significantly the ima
ge improvement of an extended object should be dramatic. In the quest for u
ltrahigh x-ray spatial resolution, the Los Alamos one-dimensional (1D) KB (
at the time of writing, under fabrication) fully exploits these facts in a
40 mm working distance, steep grazing angle multilayer mirror, 4.316 keV de
sign. A rigorous analysis of Zernike surface deformations, and all other fa
brication/assembly errors indicates negligible image degradation of the pre
dicted very high resolution performance; a similar study of existing KBs cl
osely models the 3-5 mu m resolutions over the relevant field sizes. In add
ition, a novel analytical and ray trace optimization technique allows large
r working distances at even higher resolutions. Due to instrument length co
nstraints, however, this approach was not incorporated into the 4.316 keV 1
DKB; although, in the future such designs could be easily accommodated on T
he National Ignition Facility. (C) 1999 American Institute of Physics. [S00
34-6748(99)69001-3].