Electron-stimulated desorption of hydrogen from H/Si(001)-1x1 surface studied by time-of-flight elastic recoil detection analysis

We have performed elastic recoil detection analysis with time-of-flight det ection (TOF-ERDA) to investigate the hydrogen desorption cross-section of e lectron-stimulated desorption (ESD). We confirmed that the TOF-ERDA measure ment was valid for quantitative analysis of surface hydrogen in spite of th e use of a low-energy ion beam. The desorption cross-section for the H/Si(0 01)-1 x 1 surface was determined for incident electron energy range of 25-2 00 eV. It was found that threshold electron energy of ESD was about 23 eV. The detailed feature of the electron energy dependence of the ESD cross sec tion provided the formation on the mechanism of ESD, which was related to t he core band excitation. (C) 1999 Elsevier Science B.V. All rights reserved .