A plasma, created at interaction of short-wavelength excimer laser rad
iation with flat targets was investigated (t(las) = 12ns, lambda(las)
= 0.308 mu n, q(las) = 4 - 8 x 10(12)W/cm2()) with the help of various
X-ray spectroscopic methods. The comparison of shapes and intensities
of some observable spectral lines of H-, He and Li-like ions of Na, M
g and Al with results of model calculations has allowed to determine s
pace distributions of laser plasma parameters up to distances of 0.4mm
from the target surface. Comparison of obtained results with theoreti
cal models of absorption of short-wavelength radiation in a plasma sho
ws, that the absorption of short-wavelength laser radiation in a plasm
a (at considered values of laser flux density) is executed due to inve
rse bremsstrahlung process in the areas with N-e[N-e,N-crit..