Recent progress in microthermal analysis

Authors
Reading, M Price, DM Pollock, HM Hammiche, A Murray, A
Citation
M. Reading et al., Recent progress in microthermal analysis, AM LABORAT, 31(1), 1999, pp. 13
Citations number
5
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences
Journal title
AMERICAN LABORATORY
ISSN journal
00447749 → ACNP
Volume
31
Issue
1
Year of publication
1999
Database
ISI
SICI code
0044-7749(199901)31:1<13:RPIMA>2.0.ZU;2-V
Abstract
Microthermal analysis of samples is achieved by combining scanning probe mi croscopy with microthermal analytical techniques. This paper presents a nov el application for semiconductor devices and an extension of microthermal a nalysis in which the entire sample is heated using a hot stage.