AFM studies of surface morphologies of sputtered SrTiO3 films and annealedMgO substrates

Authors
Meng, Q Moerman, R Sonnenberg, AH Gerritsma, GJ
Citation
Q. Meng et al., AFM studies of surface morphologies of sputtered SrTiO3 films and annealedMgO substrates, APPL PHYS A, 68(2), 1999, pp. 239-245
Citations number
37
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
ISSN journal
09478396 → ACNP
Volume
68
Issue
2
Year of publication
1999
Pages
239 - 245
Database
ISI
SICI code
0947-8396(199902)68:2<239:ASOSMO>2.0.ZU;2-K
Abstract
Atomic force microscopy (AFM) is applied to study the surface morphologies and growth mechanisms of sputtered SrTiO3 films on single-crystal MgO(100) substrates. Meanwhile, surface morphologies of as-polished and post-anneale d MgO(100) substrates are investigated as well. Effects of the miscut (or m isorientation) of the substrate surface on morphologies and growth mechanis ms are discussed. For comparison, a typical surface morphology and growth m echanism of the spiral island structure in sputtered PrBa2Cu3O7-delta films on MgO(100) substrates are presented.