A GaN (6.3 nm)- AlN (5.1 nm) superlattice, grown by molecular beam epitaxy
on a sapphire substrate and an AlN buffer layer, has been studied by means
of micro-Raman spectroscopy. Most of the observed features have been identi
fied and assigned to optical phonons of the superlattice layers. The averag
e biaxial strain in GaN layers has been deduced from the detailed analysis
of the frequency shift observed on the phonon lines. Additional measurement
s on the bevelled sample clearly suggest the significant increase of this s
train for decreasing distances from the interface with the buffer layer. (C
) 1999 American Institute of Physics. [S0003-6951(99)04105-4].