Theoretical and experimental study on airflow damping of vibrating microcantilevers

Authors
Hosaka, H Itao, K
Citation
H. Hosaka et K. Itao, Theoretical and experimental study on airflow damping of vibrating microcantilevers, J VIB ACOUS, 121(1), 1999, pp. 64-69
Citations number
13
Categorie Soggetti
Mechanical Engineering
Journal title
JOURNAL OF VIBRATION AND ACOUSTICS-TRANSACTIONS OF THE ASME
ISSN journal
10489002 → ACNP
Volume
121
Issue
1
Year of publication
1999
Pages
64 - 69
Database
ISI
SICI code
1048-9002(199901)121:1<64:TAESOA>2.0.ZU;2-P
Abstract
The damping characteristics of microcantilevers are clarified analytically and experimentally to establish a dynamic design method of micromechanical systems. First, an approximate formula of airflow damping was derived using the Navier-Stokes equation. A precise measurement apparatus was then devel oped to verify the theory. The damping ratios of cantilevers ranging from 0 .1 mm to 100 mm in length were measured, and the effects of beam size, vibr ational mode number, and vibrational amplitude on the damping ratio were st udied.