Fabrication of glassy carbon microstructures by soft lithography

This paper describes fabrication techniques for the fabrication of glassy c arbon microstructures. Molding of a resin of poly(furfuryl alcohol) using e lastomeric molds yields polymeric microstructures, which are converted to f ree-standing glassy carbon microstructures by heating (T similar to 500-110 0 degrees C) under argon. This approach allows the preparation of macroscop ic structures (several mm(2)) with microscopic features (similar to 2 mu m) . Deformation of the molds during molding of the resin allows preparation o f curved microstructures. The paper also presents a method of incorporating these structures on a chip by masking and electroplating. (C) 1999 Elsevie r Science S.A. All rights reserved.