G. Andra et al., In-situ diagnostics for preparation of laser crystallized silicon films onglass for solar cells, THIN SOL FI, 337(1-2), 1999, pp. 98-100
Polycrystalline silicon thin film solar cells require coarse grained silico
n layers on a glass substrate. The preparation starts with a layer of amorp
hous silicon some hundred nanometers thick. By laser crystallization it is
converted into a seed layer consisting of grains several ten mu m in size.
We report on in situ diagnostics by time resolved reflection and transmissi
on (TRRT) measurements during the preparation process. Joint diagnostics by
different lasers and the comparison with optical and electron micrographs
of the resulting films give unique information about the crystallization pr
ocesses. Even if different processes occur in hydrogenated or hydrogen free
amorphous silicon films during the heating induced by different irradiatio
n parameters the results of crystallization are quite similar. (C) 1999 Els
evier Science S.A. All rights reserved.