Performances exhibited by large area ITO layers produced by rf magnetron sputtering

This work refers to the main electro-optical characteristics exhibited by l arge area indium tin oxide films (300 x 400 mm) produced by r.f. magnetron sputtering under different oxygen concentrations and deposition pressures. Besides that, the ageing effect on the electro-optical characteristics of t he films produced was also analyzed. The results achieved show that the fil m transparency and conductivity were highly improved (more than four orders of magnitude) by first annealing them in air at 470 degrees C, followed by a reannealed stage under vacuum, in a hydrogen atmosphere, at 350 degrees C. The ageing tests show that film degradation occurs when the films are pr oduced at oxygen concentrations above 10% and/or at deposition pressures ab ove 1.2 x 10(-2) mbar. (C) 1999 Elsevier Science S.A. All rights reserved.