Scanning tunnelling microscopic observations have revealed that the re
laxation of the lattice strain in the Cu film growing on Ru(0001) occu
rs in four different stages that are connected with different superstr
uctures depending on the film thickness. Using high-resolution low-ene
rgy electron diffraction (HRLEED) the satellite spots of the different
superstructures of Cu films with a thickness up to 7 ML (monolayers)
grown at 520 K could be identified and quantitatively analysed. Howeve
r, for Cu films thicker than 2 ML the diffraction patterns are very co
mplex because satellite spots of several superstructures are incoheren
tly superposed. Surprisingly, the structural data derived in a local s
cale by scanning tunnelling microscopy (STM) are highly representative
for the entire surface, analysing by low-energy electron diffraction
(LEED). This demonstrates the stability of the relaxation process. Cor
rugated Cu(111) layers formed after a deposition of 4 ML are rotated w
ith respect to the Ru lattice within a small range of angles of only /-0.7 degrees. (C) 1997 Elsevier Science B.V.