On the use of the matrix pencil method for deep level transient spectroscopy: MP-DLTS

A new approach to capacitance transient analysis, based on the matrix penci l (MP) method, is proposed for deep level transient spectroscopy (DLTS) (MP -DLTS). The MP method offers the least statistical variance of the estimate s in the presence of noise, Simulation tests have shown this method to lead to a significant improvement in DLTS resolution even for low trap concentr ations. Its noise sensitivity and resolution are quantified and compared wi th five different DLTS analysis techniques. The MP-DLTS method is found to outperform both DLTS spectrum and direct transient analysis techniques. An experimental investigation of the electrically active defects induced by a germanium preamorphization step prior to dopant implantation was undertaken using the MP-DLTS method. Two electron traps were detected in all samples and characterized.