Development of a six-component miniature force sensor using silicon micromachining and conventional machining technologies

Authors
Jin, WL Mote, CD
Citation
Wl. Jin et Cd. Mote, Development of a six-component miniature force sensor using silicon micromachining and conventional machining technologies, IEEE INSTR, 47(3), 1998, pp. 715-719
Citations number
18
Categorie Soggetti
Instrumentation & Measurement
Journal title
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
ISSN journal
00189456 → ACNP
Volume
47
Issue
3
Year of publication
1998
Pages
715 - 719
Database
ISI
SICI code
0018-9456(199806)47:3<715:DOASMF>2.0.ZU;2-X
Abstract
A six-component miniature force sensor (5x5x5 mm(3)) is developed using mic rofabrication and conventional precision;machining technologies. High sensi tivity and high stiffness are obtained simultaneously with a novel silicon sensing element design, Fair agreement between predicted and measured sensi tivities is obtained.