Parameter extraction of resistive thermal microsensors by AC electrical method

Citation
M. Ou-yang et al., Parameter extraction of resistive thermal microsensors by AC electrical method, IEEE INSTR, 47(2), 1998, pp. 403-408
Citations number
14
Categorie Soggetti
Instrumentation & Measurement
Journal title
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
ISSN journal
00189456 → ACNP
Volume
47
Issue
2
Year of publication
1998
Pages
403 - 408
Database
ISI
SICI code
0018-9456(199804)47:2<403:PEORTM>2.0.ZU;2-R
Abstract
Obtaining device parameters of thermal microsensors is essential for evalua ting their performances and simulation modeling. We report an sc electrical method for extracting these parameters experimentally with relatively simp le instrumentation. The basic parameters of resistive microsensors, the res istance, temperature coefficient of resistance, thermal capacitance, and co nductance, are derivable from the second harmonic signal of the output volt age induced by a sinusoidal driving current. The results are compared with other methods.