Parameter extraction of resistive thermal microsensors by AC electrical method

Obtaining device parameters of thermal microsensors is essential for evalua ting their performances and simulation modeling. We report an sc electrical method for extracting these parameters experimentally with relatively simp le instrumentation. The basic parameters of resistive microsensors, the res istance, temperature coefficient of resistance, thermal capacitance, and co nductance, are derivable from the second harmonic signal of the output volt age induced by a sinusoidal driving current. The results are compared with other methods.