Electrooptical measurement system for the DC characterization of visible detectors for CMOS-compatible vision chips

An electrooptical measurement System for the de characterization of visible detectors for CMOS-compatible vision chips is presented, which can help de signers to characterize these detectors, The measurement system has been de signed to be versatile, fast, and easily expandable and used. Two different setups for the measurement of the spectral response and the optical dynami c range of the detectors are described in detail. Measurements of the spect ral response are done with a fully computer-controlled setup, avoiding tedi ous and inaccurate measurements. A description of the different detectors a vailable in a CMOS process is also given, together with the parameters affe cting their response and a set of test structures which can be useful for t he characterization of the detectors.