A measurement-based design equation for the attenuation of MMIC-compatiblecoplanar waveguides

Measured attenuation of coplanar waveguide (CPW) transmission lines with na rrow strip and slot widths fabricated on GaAs, high-resistivity Si, and InP is used to derive a new closed-form equation to calculate line losses. Thi s new equation is shown to be more accurate than previous expressions, yet simple enough to be programmed into a hand-held calculator since it is base d on a simple relationship between attenuation and the product of the strip and slot widths. The derived equation is applicable to CPW's with aspect r atio and metal thicknesses commonly used in monolithic microwave integrated circuits.