Special section on the Eighth Annual Advanced Semiconductor Manufacturing Conference and Workshop (ASMC'97) - Guest editorial

Authors
Nurani, RK Seshadri, S
Citation
Rk. Nurani et S. Seshadri, Special section on the Eighth Annual Advanced Semiconductor Manufacturing Conference and Workshop (ASMC'97) - Guest editorial, IEEE SEMIC, 12(1), 1999, pp. 1-2
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
ISSN journal
08946507 → ACNP
Volume
12
Issue
1
Year of publication
1999
Pages
1 - 2
Database
ISI
SICI code
0894-6507(199902)12:1<1:SSOTEA>2.0.ZU;2-G