Automatic generation of thin film process flows - Part I: Basic algorithms

This paper is the first in a series of two papers describing the algorithms used in the development of MISTIC (Michigan synthesis tools for integrated circuits). MISTIC is a planar device process compiler that generates proce ss hows for thin film devices from schematics of their structure, This soft ware uses a laboratory specific database of process recipes to produce proc ess hows for a specific set of laboratory resources (furnaces, etchers, lit hography equipment, etc.) and generates process statistics that help to cho ose the most suitable process how in a comparative manner. The process comp iler is augmented by several auxiliary modules: a device builder, process v iewer, and database editor thus forming a self-contained process design env ironment. This paper concentrates on the algorithms used to construct proce ss hows from schematic device representations. The compiler algorithms firs t extract a directed graph representation of the device organization stored in the form of a restricted square boolean matrix. This matrix is used to generate linear ordered lists of device layers which serve as footprints fo r the construction of profess flows. Process hows are then constructed from these lists through a series of conversions, expansions, and insertions of process steps. The theoretical foundations for the algorithms can be found in [1].