The mathematical modeling of the flow and temperature fields in an inductiv
ely coupled radio frequency (rf) plasma torch is carried out with the objec
tive of elucidating the basic of turbulence phenomena met under such discha
rge conditions. Temperature and density fluctuations are included in the k-
epsilon turbulence model to investigate their effect on the plasma turbulen
ce and energy transfer. Two distinct regions, one almost fully laminar and
another significantly turbulent, are shown to coexist in the discharge. The
effects of operation parameters on the plasma turbulence are discussed. (C
) 1998 Elsevier Science Ltd. All rights reserved.