A time-of-flight spectrometer for investigations on liquid metal ion sources

Authors
Muhle, R Dobeli, M Maden, C
Citation
R. Muhle et al., A time-of-flight spectrometer for investigations on liquid metal ion sources, J PHYS D, 32(2), 1999, pp. 161-167
Citations number
18
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF PHYSICS D-APPLIED PHYSICS
ISSN journal
00223727 → ACNP
Volume
32
Issue
2
Year of publication
1999
Pages
161 - 167
Database
ISI
SICI code
0022-3727(19990121)32:2<161:ATSFIO>2.0.ZU;2-X
Abstract
A time-of-flight spectrometer with differential pulse sweeping was develope d for the mass and energy analysis of ions emitted from liquid metal ion so urces. The system was tested with a gallium liquid metal ion source. The an gular intensity of the total source current, the mass spectra and the energ y spread for Ga2+, Ga+ and Ga-2(+) as function of source current have been measured. A mass and energy resolution of about 700 has been obtained indep endent of the ion mass.