FeCoN films with 10 at.% Co content were prepared by the sputtering method.
The effect of annealing on the structure and magnetic properties of FeCoN
films was investigated. The as-deposited FeCoN films consist of alpha'-(Fe,
Co) martensite. Annealing at 150-200 degrees C alpha'-(Fe, Co) martensite
transforms into the alpha "-(Fe, Co)(16)N-2 phase. The alpha "-(Fe, Co)(16)
N-2 formed at 150-200 degrees C decomposes into alpha-(Fe, Co) and gamma'-(
Fe, Co)(4)N at annealing temperature T-a = 450 degrees C, and it disappears
in the FeCoN film annealed at T-a = 500 degrees C The FeCoN films annealed
at 150-400 degrees C show very high saturation magnetization 4 pi M-s = 25
-27 kG, which confirms the high saturation magnetization of the alpha "-(Fe
, Co)(16)N-2.