The fast sol-gel method enables facile preparation of siloxane-based glassy
matrices, in which polymerization is completed within minutes and volume c
hanges <5% take place upon curing. Single-face and two-face replication of
micro-optical arrays have been obtained, as well as crack-free elements >10
mm thick. Minimizing shrinkage and enabling relaxation of the drying sol-g
el are key factors in the elimination of cracking. These features and the r
esulting optical quality of the glass make this method technologically and
economically attractive for replication-produced micro-lenses and micro-opt
ical arrays.