Recent work has indicated that Ormosil films, fabricated from organically m
odified precursors, produce better sensor performance for some specific app
lications, compared to films fabricated from conventional sol-gel precurors
such as TEOS or TMOS. This paper aims to compare film properties and senso
r behavior for films fabricated from tetraethoxysilane (TEOS) and tetrameth
oxysilane (TMOS) silica precursors and both methyltrimethoxysilane (MTMS) a
nd methyltriethoxysilane (MTES) organically modified precursors. Microstruc
tural differences, for example, porosity changes due to the different precu
rsor backbone structures, are interrogated by monitoring oxygen gas and aqu
eous-phase sensor response. Oxygen sensing using these films is enabled by
incorporating in the films an oxygen-sensitive ruthenium dye whose fluoresc
ence is quenched in the presence of oxygen. Film properties such as thickne
ss, thickness stabilization time, as well as sensor response, are discussed
in terms of relative hydrolysis and condensation behaviour for the differe
nt precursors. Film hydrophobicity, an issue which has been identified as b
eing of crucial importance for optimum dissolved oxygen sensor response, is
discussed and contact angle measurements are used to investigate the degre
e of hydrophobicity for different film types. The main motivation for this
work is film optimization for optical gas-phase and dissolved oxygen sensor
s.