Sol-gel deposited Sb-doped tin oxide films

The structural, electrical and optical properties of single sol-gel derived antimony-doped tin oxide (ATO) films sintered at 550 degrees C have been m easured. The reproducibility of both the preparation and the characterizati on procedures have been tested by a round-robin test involving eight labora tories within a Concerted European Action (CEA) project. The resistivity me asured as a function of Sb content has been obtained by electric and reflec tance and transmission measurements. Their differences are discussed in ter ms of structural and grain boundary effects. An increase of Sb content resu lts in a decrease of the crystallite size (7.0 to 5.4 nm) and a greater inf luence of the grain boundary.