Atomic force microscopy study of TiO2 films obtained by the sol-gel method

Atomic Force Microscopy (AFM) was used to study the influence of thermal tr eatments on the structural and textural properties of the sol-gel TiO2 film s obtained from Ti(OC3H7i)(4). X-ray diffraction (XRD), ellipsometric and p orosity measurements have also been made. The TiO2 sol-gel films were homogeneous, transparent and amorphous. Heat tr eatments in the 400-600 degrees C range indicate that the films have a stro ng tendency to crystallization. The high initial homogeneity of the TiO2 fi lms was preserved during the crystallization process. AFM shows that the th ermally treated films exhibit uniform, monodispersed crystals.