Ferroelectric PZT thin films by sol-gel deposition

Sol-gel spin coating has a low "thermal budget," is cheap compared to vacuu m-based techniques and is now routinely used to produce dense, pore-free fe rroelectric films. PbZrxTi(1-x)O-3 (PZT) is utilized in most applications b ecause it has a large remanent polarization, high piezo- and pyroelectric c oefficients and optimized electromechanical coupling factors, depending on precise composition. This paper will review some of the principles and appl ications of PZT films and highlight using transmission electron microscopy some of the basic problems and solutions involved in producing device-quali ty material on Si-substrates.