ELECTRON-BEAM LITHOGRAPHY

Authors
HARRIOTT L LIDDLE A
Citation
L. Harriott et A. Liddle, ELECTRON-BEAM LITHOGRAPHY, Physics world, 10(4), 1997, pp. 41-45
Citations number
9
Categorie Soggetti
Physics
Journal title
Physics world → ACNP
ISSN journal
09538585
Volume
10
Issue
4
Year of publication
1997
Pages
41 - 45
Database
ISI
SICI code
0953-8585(1997)10:4<41:EL>2.0.ZU;2-Q