This paper covers a numerical analysis of the self-heating effect and the e
ffect of mutual heating of nearest neighbouring cells in low-voltage power
VDMOS transistors. A temperature distribution within the cell as well as in
the area between nearest neighbouring cells of VDMOS device operating in b
oth linear and saturation region was calculated on the basis of proposed th
eoretical model. (C) 1999 Elsevier Science Ltd. All rights reserved.