The amorphous TbFeCo films covered with the protective AlN films have
been prepared by the rf magnetron sputtering system. It is found that
the protective AlN films not only protect rare earth elements from oxi
dation and enhance magneto-optical Kerr effect but also affect the mag
netic properties of the rare earth-transition metal films. The coerciv
ity H-c and perpendicular magnetic anisotropy energy constants K-u1' a
nd K-u2 of the films are changed with the thickness of the protective
AlN films. It can be explained according to the stress mechanism and t
he model of single ion anisotropy.