Dislocations act in semiconductors as combined positron traps, consisting o
f a shallow precursor state, which is related to regular parts of the dislo
cation line, and bound vacancy-like defects. The motion of dislocations dur
ing plastic deformation generates a high number of point defects. The clust
ering of vacancies to stable voids is regarded as a primary process of the
jog dragging mechanism. Vacancy densities were quantitatively determined fo
r different deformation conditions of GaAs.