Microwave diagnostics in electron cyclotron resonance plasma sources

The plasma source, which is of high importance in the optimization of the s eparation of the gadolinium isotopes by the plasma separation process, requ ires a precise knowledge of its physical characteristics. Thus, a diagnosti c has been developed to estimate the microwave power inside the source. A m icrostrip antenna has been designed and developed in order to characterize the microwave field at 36 GHz frequency in the plasma source. The experimen tal results for different plasma regimes are presented. The measurements in side the plasma source show a maximum of microwave absorption for an argon pressure of 10(-4) mbar with 93% absorption of the incident wave in the con ditions of isotope separation. (C) 1999 American Institute of Physics. [S00 34-6748(99)00701-7].