IDENTIFICATION OF THE TERMINATING STRUCTURE OF 6H-SIC(0001) BY COAXIAL IMPACT COLLISION ION-SCATTERING SPECTROSCOPY

The terminating structure of 6H-SiC(0001) substrates fabricated by the Acheson method was directly identified by means of coaxial impact col lision ion scattering spectroscopy (CAICISS). The CAICISS spectra show ed that the topmost surfaces of the samples were Si-terminated planes for both the front and rear faces. It was also shown that the (0001)Si face was composed of Si-terminated flat terraces and steps, the heigh t of which corresponded to one-half the unit cell length along the 6H- SiC c axis. (C) 1997 American Institute of Physics.