We have examined Si-doping effects in InGaN/InGaN quantum-well (QW) structu
res, especially the influence of Si-doped InGaN barrier layers on the growt
h mechanism of QW structures, by atomic force microscopy (AFM) and by photo
luminescence (PL) and cathodoluminescence (CL) spectroscopy. Our AFM observ
ations revealed that Si-doped InGaN barriers strongly affect the growth mod
e of overlying InGaN QW layers. This effect leads to the formation of nanos
cale islands (with a density of 10(8) cm(-2)) due to spiral growth of the Q
W layers. The spirally grown nanoscale islands significantly increase the P
L intensity. Through spatially resolved CL observations, we found that the
number of dot-like CL bright spots increased dramatically when the barrier
layers were Si doped, and the increased density of the spots was in good ag
reement with the increased density of the nanoscale islands observed by AFM
. By combining these results, we show that the spirally grown QW structures
produced by Si doping of the barriers effectively reduce the fluctuation o
f the band-gap potential in InGaN QW layers. (C) 1999 American Institute of
Physics. [S0003-6951(99)01108-0].