D. Stapel et al., Secondary ion emission from arachidic acid LB-layers under Ar+, Xe+, Ga+ and SF5+ primary ion bombardment, APPL SURF S, 140(1-2), 1999, pp. 156-167
The influence of primary ion energy, mass and composition on sputtering and
secondary ion emission of arachidic acid Langmuir-Blodgett mono- and multi
layers, deposited on gold substrates, has been investigated. Ga+, Ar+, Xe-1
29(+) and SF5+ in the energy range 5-25 keV were used as primary ions. Yiel
ds Y, damage cross-sections sigma, and ion formation efficiencies E have be
en determined for selected secondary ions, characterizing the molecular ove
rlayer, the overlayer substrate interface and the substrate. We found a str
ong influence of layer thickness and of primary ion energy, mass and compos
ition on Y, a and E. Information depth increases with increasing ion energy
and decreasing mass of primary ions, being higher for SF: than for Xe+. Y,
sigma and E increase with increasing primary ion mass. They are considerab
ly higher for a molecular (SF5+) than for atomic ions of comparable mass (X
e-129(+)). The experimental results supply information on the extension of
impact cascades, generated in different substrate materials by different pr
imary ion species and different energies. They demonstrate that in analytic
al SIMS application information depths can be minimized and yields and ion
formation efficiencies can be maximized by the use of molecular primary ion
s. (C) 1999 Elsevier Science B.V. All rights reserved.