Microstructure and X-ray analysis on LaCaMnO thin film

La2/3Ca1/3MnO3 thin films in the thickness range between 40-500 nm, have be en deposited by an optimised pulsed laser deposition process on SrTiO3 (STO ) single crystal substrates. The surface morphology of the thin films was e xamined by AFM and SEM. X-ray investigations were applied to study the latt ice parameters. XRD pole figures show an epitaxial growth of manganite thin films on (100) STO substrate. According to X-ray diffraction pattern, we c ould derive the dependence of the lattice parameters within the thickness o f the film. It is shown that Rietveld refinement of XRD pattern is essentia l to assess the structure of the manganite phase. Lattice parameters are re fined and distances and bond angels were determined. A correlation between structure, transport properties and thickness are discussed. (C) 1999 Elsev ier Science B.V. All rights reserved.