Characterization of modifications observed on nitrides after an UV laser exposure

Surface modifications on aluminium nitride (BW) induced by an UV laser trea tment have been investigated using advanced surface techniques (scanning el ectronic microscopy (SEM), energy dispersive spectroscopy (EDS), Auger elec tron spectroscopy (AES), X-ray diffraction (XRD),,,) and electrical resista nce measurements. AES and XRD analysis have revealed the presence of an Al metallic film upon the laser irradiated zone while SEM and EDS analysis hav e shown the formation of a halo rich in oxygen around it, Electrical measur ements have confirmed the metallic nature of the laser-exposed surface, whe re a conductive path can be drown upon the insulator AIN ceramic. Irradiati on parameters (energy density and number of pulses) have been determined re garding to the obtaining of a metallic thin film by this one-step process. (C) 1999 Elsevier Science B.V, All rights reserved.