The dielectric perovskite-type oxide SrTiO3 thin films have been epitaxiall
y grown on (001)LaAlO3 single crystal substrates on the basis of optimizati
on of pulsed laser deposition (PLD) process. Several analytical techniques,
such as X-ray diffraction theta-2 theta scan and phi scan, AFM, XPS were u
sed to characterize the epitaxial property, growth mechanism and surface ch
emical composition of these SrTiO3 thin films. (C) 1999 Elsevier Science B.
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