Epitaxial growth of dielectric SrTiO3 thin films by pulsed laser deposition

Citation
T. Yu et al., Epitaxial growth of dielectric SrTiO3 thin films by pulsed laser deposition, APPL SURF S, 139, 1999, pp. 605-608
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
139
Year of publication
1999
Pages
605 - 608
Database
ISI
SICI code
0169-4332(199901)139:<605:EGODST>2.0.ZU;2-K
Abstract
The dielectric perovskite-type oxide SrTiO3 thin films have been epitaxiall y grown on (001)LaAlO3 single crystal substrates on the basis of optimizati on of pulsed laser deposition (PLD) process. Several analytical techniques, such as X-ray diffraction theta-2 theta scan and phi scan, AFM, XPS were u sed to characterize the epitaxial property, growth mechanism and surface ch emical composition of these SrTiO3 thin films. (C) 1999 Elsevier Science B. V. All rights reserved.