Measurement and modeling of Si integrated inductors

Citation
P. Arcioni et al., Measurement and modeling of Si integrated inductors, IEEE INSTR, 47(5), 1998, pp. 1372-1378
Citations number
7
Categorie Soggetti
Instrumentation & Measurement
Journal title
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
ISSN journal
00189456 → ACNP
Volume
47
Issue
5
Year of publication
1998
Pages
1372 - 1378
Database
ISI
SICI code
0018-9456(199810)47:5<1372:MAMOSI>2.0.ZU;2-V
Abstract
This work describes a method to derive from measurements an accurate lumped element model of spiral integrated inductors on silicon substrate. The ana lysis method is based on a wideband two-port measurement of the s-parameter s of the device under test and enables an accurate evaluation of the parasi tic effects that limit the performances of these integrated devices.