Citation
Iy. Mittova et al., Thermal oxidation of InP in the presence of PbO vapor, INORG MATER, 35(1), 1999, pp. 7-9
Citations number
12
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
INORGANIC MATERIALS
ISSN journal
00201685
→ ACNP
Volume
35
Issue
1
Year of publication
1999
Pages
7 - 9
Database
ISI
SICI code
0020-1685(199901)35:1<7:TOOIIT>2.0.ZU;2-M
Abstract
The introduction of PbO to the gas phase accelerates thermal oxidation of I
nP and allows one to reduce the oxidation temperature. As distinct from the
process without PbO, the process studied yields films with satisfactory di
electric properties.